suitable to replace platinum as experimental material. And its process is: Tantalum billet (raw material)-grinding-inspection-warming-vacuum annealing-inspection-shear vacuum annealing-inspection-packaging.

         (1) The replication accuracy of the polishing machine The deviation of the size and shape of the polished workpiece relative to the cathode profile is called the replication accuracy, and its influencing factors mainly include the unevenness of the electrode gap and its distribution, the installation error of the cathode and the workpiece, and the deformation of the workpiece when loading and unloading.

        (2) The absolute accuracy of the polishing machine The deviation of the size and shape of the polishing workpiece relative to the requirements of the design drawing is called absolute accuracy, and its influencing factors include the size and uniformity of the haze between the electrodes, the profile accuracy of the cathode, etc., in fact, it is a combination of the replication accuracy and the accuracy of the cathode profile. (3) The repeatability of the polishing machine The deviation of the size and shape between a batch of workpieces processed by the cathode of the same tool is called repeatability, and its influencing factors mainly include the instability of the redemption between the electrodes, the clamping error of the workpiece, etc.

 

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